University of Illinois Urbana-Champaign

Calibration of an Integrated VCSEL/PIN Device for Position Sensing

Hardy, Nicholas D.

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https://hdl.handle.net/2142/47027

Description

Title
Calibration of an Integrated VCSEL/PIN Device for Position Sensing
Author(s)
Hardy, Nicholas D.
Contributor(s)
Choquette, Kent
Issue Date
2009-05
Keyword(s)
  • lasers
  • semiconductor lasers
  • vertical-cavity surface-emitting lasers
  • photodetectors
  • sensing
  • position sensing
  • PIN photodetectors
Abstract
Compact, non-contact, and low operating power sensors are desirable for a number of applications. Mono- lithically integrated vertical-cavity surface-emitting lasers (VCSELs) and PIN photodetectors have been designed and fabricated for optical position sensing. Using a metallic grating as a position gauge, the sensors measure differences in reflected power from the grating as it travels parallel to the sensors. This measurement technique allows for a high spatial resolution. Calculations indicate that such a device can detect spatial changes on the order of the wavelength of light emitted from the laser. Measurements from the work described here show the potential to use VCSEL/PIN chips to determine position with an accuracy of sub-micron resolution.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47027

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