University of Illinois Urbana-Champaign

Fabrication of Au Microtube Arrays Using Metal-Assisted Chemical Etching

Tsai, Hsing-Keng

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https://hdl.handle.net/2142/47205

Description

Title
Fabrication of Au Microtube Arrays Using Metal-Assisted Chemical Etching
Author(s)
Tsai, Hsing-Keng
Contributor(s)
Li, Xiuling
Issue Date
2010-05
Keyword(s)
  • microtubes
  • gold nanotubes
  • microtube arrays
  • microtube array fabrication
  • metal-assisted chemical etching
Abstract
Micro/nanoscale metal structures have been widely used in chemical and biological sensing and catalysis, and among these, the chemical properties of Au have been well developed and studied, and determined to be desirable for their stability. The three-dimensional tube structures also increase the surface area and may be used to create sensors with high sensitivity. This research uses a top-down approach with metal-assisted chemical etching (MacEtch) to produce large three-dimensional periodic micron-sized Au tube arrays on a silicon wafer. The goal of this project is to create a fabrication process that optimizes the yield of the Au tube structures.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47205

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