University of Illinois Urbana-Champaign

Development of electrode manipulated close-packed microplasma jet arrays in a transparent polymer

Sun, Peng

Content Files
Peng_Sun.pdf

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https://hdl.handle.net/2142/46730

Description

Title
Development of electrode manipulated close-packed microplasma jet arrays in a transparent polymer
Author(s)
Sun, Peng
Issue Date
2014-01-16T18:00:34Z
Director of Research (if dissertation) or Advisor (if thesis)
Eden, James G.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Date of Ingest
2014-01-16T18:00:34Z
Keyword(s)
  • Microplasma
  • Jet Arrays
  • Optical Emission Spectrum
  • Temporally resolved behavior
Abstract
Close-packed arrays of novel microplasma jets at atmospheric pressure have been realized in a moldable, resilient, and optically transparent polymer in multiple dimensions. A micromolding-based assembly process enables microplasma jets to be generated in cylindrical microchannels with diameters ≤350 μm, and jet lengths up to ~4 mm when the He backing pressure is ~840 Torr. Driven by a 20 kHz sinusoidal ac voltage waveform, the operating voltages are as low as 1 kV rms. Arrays as large as 121 jets in a cross-sectional area of 100 mm2 and having excellent jet-to-jet uniformity have been developed to date. The packing density of this technology has been increased more than an order of magnitude relative to previous technologies. Simulation of experimental emission spectra for the first negative system of N2+ (B (v′=0, J′)  X (v″ = 0, J″)) show the gas temperature of the microplasma to be 290 ±10 K. Optical emission spectroscopy has been employed to investigate the chemical kinetics of the He (21, 3S) and He2 (a excited states interacting with laboratory air. For the first time, three-dimensional microplasma jet arrays have also been demonstrated. Curved and structured targets can be accomplished smoothly with three-dimensional arrays. Examination of He microplasma with an ICCD camera reveals considerable structure on the spatial emission profiles for the jets. Individual microchannel control has been developed in an array device. For glow regions of the microplasma, the peak intensity is produced 88-112 μm from the wall of the microchannel, which is consistent with a sheath thickness on the order of 10–30 λD, where the Debye length λD is ~3 μm for ne = 1013 cm-3. The ability to shape the individual geometry of plasma in a microchannel array while maintaining a stable glow, in combination with the resilience, transparence, and size of the array, suggests that the future of this microplasma array jet is promising, particularly for applications as diverse as personalized medical therapeutics and materials processing.
Graduation Semester
2013-12
Permalink
http://hdl.handle.net/2142/46730
Copyright and License Information
Copyright 2013 Peng Sun

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