University of Illinois Urbana-Champaign

Observation and Analysis of Characteristics of Controlled Micro-Plasma in Arrays of Micro-Cavities

Moon, Yeon Joon

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Description

Title
Observation and Analysis of Characteristics of Controlled Micro-Plasma in Arrays of Micro-Cavities
Author(s)
Moon, Yeon Joon
Contributor(s)
  • Eden, Gary
  • Park, Sung-Jin
Issue Date
2011-12
Keyword(s)
  • plasma devices
  • microplasma devices
  • microcavity plasma devices
  • dielectric barrier discharge
Abstract
A dielectric barrier discharge (DBD) device filled with noble gases emits visible light when AC source is applied. In a planar DBD device, generation of micro-filaments can be observed with unpredictable pattern. However by having internal micro-cavity structures, we can confine these micro-filaments and affect their behaviors. Through varying the gas mixture, voltage, frequencies, and internal geometric structures of the device, behavior of plasma can be controlled. By varying the cavity diameters (1 mm to combination of 3 mm and 1 mm) and the gas used (neon and xenon and neon mixture), while sweeping the voltages and frequencies, various different micro-plasma behaviors were shown. Temporal response of these behaviors accordingly with their electric properties was used to investigate these observations.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/46534

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