Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

Mei, Antonio Rodolph

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https://hdl.handle.net/2142/42357 Copy

Description

Title

Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

Author(s)

Mei, Antonio Rodolph

Issue Date

2013-02-03T19:36:18Z

Director of Research (if dissertation) or Advisor (if thesis)

Rockett, Angus A.

Department of Study

Materials Science & Engineerng

Discipline

Materials Science & Engr

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• transition metal nitride
• metastable alloy
• spinodal decomposition
• nanostructure
• ion bombardment
• reactive magnetron sputtering

Graduation Semester

2012-12

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http://hdl.handle.net/2142/42357

Copyright and License Information

Copyright 2012 Antonio Rodolph Mei

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