University of Illinois Urbana-Champaign

Residual stress effects on piezoelectric response of sol-gel derived PZT thin films

Berfield, Thomas A.; Ong, Ryan J.; Payne, David A.; Sottos, Nancy R.

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https://hdl.handle.net/2142/320

Description

Title
Residual stress effects on piezoelectric response of sol-gel derived PZT thin films
Author(s)
  • Berfield, Thomas A.
  • Ong, Ryan J.
  • Payne, David A.
  • Sottos, Nancy R.
Issue Date
2005-04
Abstract
Piezoelectric properties of three sol-gel derived Pb(Zr0.53Ti0.47)O3 thin film samples integrated on to Pt/Ti/SiO 2//Si substrates are investigated to delineate the influence of residual stress on the strain-field response from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for identical films ranging in thickness from 190nm to 500nm. Field-induced strains are measured interferometically for each film under either a large AC driving voltage or a small AC ripple applied over a range of DC biases. Higher residual stresses decrease measured piezoelectric response, while thickness variations with no accompanying change in residual stress state produce little change in strain-field behavior. The diminished performance associated with high residual stresses is attributed to reductions in both linear and nonlinear contributions, including decreased polarization switching and domain motion.
Publisher
Department of Theoretical and Applied Mechanics (UIUC)
Series/Report Name or Number
TAM Reports 1062, (2005)
ISSN
0073-5264
Type of Resource
text
Language
en
Permalink
http://hdl.handle.net/2142/320

Owning Collections

Technical Reports - Theoretical and Applied Mechanics (TAM) PRIMARY
TAM technical reports include manuscripts intended for publication, theses judged to have general interest, notes prepared for short courses, symposia compiled from outstanding undergraduate projects, and reports prepared for research-sponsoring agencies.