Modeling and measurements of an ionized physical vapor deposition device plasma

Juliano, Daniel Rene

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Description

Title

Modeling and measurements of an ionized physical vapor deposition device plasma

Author(s)

Juliano, Daniel Rene

Director of Research (if dissertation) or Advisor (if thesis)

Ruzic, David N.

Doctoral Committee Chair(s)

Ruzic, David N.

Committee Member(s)

• Sullivan, Jeremiah D.
• Lamb, F.K.
• Van Harlingen, Dale J.

Department of Study

Physics

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

PhD

Degree Level

Dissertation

Type of Resource

text

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https://hdl.handle.net/2142/31254

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