Experimental study of rare-gases excimer VUV system and H2 Lyman-bands calibration
Ke, Haochen
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https://hdl.handle.net/2142/31011
Description
Title
Experimental study of rare-gases excimer VUV system and H2 Lyman-bands calibration
Author(s)
Ke, Haochen
Issue Date
2012-05-22T00:21:29Z
Director of Research (if dissertation) or Advisor (if thesis)
Glumac, Nick G.
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Excimer
Rare-gases
Vacuum Ultra Violet(VUV)
Vacuum system
Lyman-band
Calibration
Experiment
Spectrum
Abstract
An electron impact rare gas excimer vacuum ultra-violet experimental system is custom-designed and tested using an argon and H2 mixture. An electron flooding system, i.e. filament, is used as the hot electron source. A SiNx membrane is applied as the entrance foil separating the high vacuum chamber and the test gas chamber. A Custom-designed UV photon intensifier together with high-resolution CCD detector is used to increase the spectrum resolution up to three orders of magnitude higher than previous study. The experimental setting yields sufficiently highly resolved spectrum that could be analyzed in detail. H2 Lyman-bands are used for the spectrum calibration. A Diatomic code is applied as a simulation reference which is proved to be insufficient for accurate calibration. A Comprehensive calibration using experimental spectrum, diatomic simulation and an H2 Atlas is performed, and the result shows that the scaling of the spectrometer and detector is off by 0.08 nm, which is a reasonable number for low resolution spectrometer systems.
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