Experimental study of rare-gases excimer VUV system and H2 Lyman-bands calibration

Ke, Haochen

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https://hdl.handle.net/2142/31011 Copy

Description

Title

Experimental study of rare-gases excimer VUV system and H2 Lyman-bands calibration

Author(s)

Ke, Haochen

Issue Date

2012-05-22T00:21:29Z

Director of Research (if dissertation) or Advisor (if thesis)

Glumac, Nick G.

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Date of Ingest

2012-05-22T00:21:29Z

Keyword(s)

• Excimer
• Rare-gases
• Vacuum Ultra Violet(VUV)
• Vacuum system
• Lyman-band
• Calibration
• Experiment
• Spectrum

Abstract

An electron impact rare gas excimer vacuum ultra-violet experimental system is custom-designed and tested using an argon and H2 mixture. An electron flooding system, i.e. filament, is used as the hot electron source. A SiNx membrane is applied as the entrance foil separating the high vacuum chamber and the test gas chamber. A Custom-designed UV photon intensifier together with high-resolution CCD detector is used to increase the spectrum resolution up to three orders of magnitude higher than previous study. The experimental setting yields sufficiently highly resolved spectrum that could be analyzed in detail. H2 Lyman-bands are used for the spectrum calibration. A Diatomic code is applied as a simulation reference which is proved to be insufficient for accurate calibration. A Comprehensive calibration using experimental spectrum, diatomic simulation and an H2 Atlas is performed, and the result shows that the scaling of the spectrometer and detector is off by 0.08 nm, which is a reasonable number for low resolution spectrometer systems.

Graduation Semester

2012-05

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http://hdl.handle.net/2142/31011

Copyright and License Information

Copyright 2012 Haochen Ke

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