Strain sensor array using printed single crystalline silicon on plastic substrate
Won, Sang M.
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https://hdl.handle.net/2142/26359
Description
Title
Strain sensor array using printed single crystalline silicon on plastic substrate
Author(s)
Won, Sang M.
Issue Date
2011-08-26T15:32:57Z
Director of Research (if dissertation) or Advisor (if thesis)
Rogers, John A.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
strain sensor
flexible electronic
radio frequency
Abstract
This thesis analyzes the piezoresistive effect in metal and semiconductor, discusses the effect
of temperature and doping concentration, introduces a newly developed strain gauge using
single crystalline silicon on plastic substrate, and describes the Colpitts oscillator that has the potential of wireless data transmission between sensor and data acquisition unit. In general, a metal strain gauge has high flexibility with low sensitivity, whereas the semiconductor strain
gauge has high sensitivity with low flexibility. Devices using thin ribbons of single crystalline
silicon on plastic show gauge factor of 41 with good flexibility and repeatability. Integrating
with PN diodes on the same substrate yields a large area 6 x 6 array that can be used in various applications such as structural health monitoring and cybergloves. The successful fabrication of all active and passive components of the Colpitts oscillator on the same flexible substrate has great promise for future high speed wireless data acquisition systems.
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