University of Illinois Urbana-Champaign

A study of amorphous hydrogenated titanium carbide films: Structure, stability, and role of hydrogen doping

Kaloyeros, Alain Elie

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https://hdl.handle.net/2142/25456

Description

Title
A study of amorphous hydrogenated titanium carbide films: Structure, stability, and role of hydrogen doping
Author(s)
Kaloyeros, Alain Elie
Issue Date
1987
Doctoral Committee Chair(s)
Williams, W.S.
Department of Study
Physics
Discipline
Physics
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
  • amorphous hydrogenated titanium carbide films
  • hydrogen doping
  • metallorganic chemical vapor deposition
  • tetraneopentyl-titanium
Language
en
Abstract
Amorphous hydrogenated titanium carbide films (a-TiC :H , X y 0.88
Type of Resource
text
Permalink
http://hdl.handle.net/2142/25456
Copyright and License Information
1987 Alain Elie Kaloyeros

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