High precision electrohydrodynamic printing of polymer onto microcantilever sensors
Pikul, James H.
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https://hdl.handle.net/2142/24046
Description
Title
High precision electrohydrodynamic printing of polymer onto microcantilever sensors
Author(s)
Pikul, James H.
Issue Date
2011-05-25T14:58:45Z
Director of Research (if dissertation) or Advisor (if thesis)
King, William P.
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Microcantilever
Sensor
Electrohydrodynamics
Polymer Deposition
Polymer Printing
Microelectromechanical Systems
Mass Sensing
Abstract
This thesis reports electrohydrodynamic jet printing to deposit 2 – 27 um diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50 - 4130 Hz corresponded to a polymer mass of 4.5 - 135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.
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