Position and velocity sensing measurements using an integrated VCSEL and pin photodetector assembly
Jefvert, Thomas M.
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https://hdl.handle.net/2142/24383
Description
Title
Position and velocity sensing measurements using an integrated VCSEL and pin photodetector assembly
Author(s)
Jefvert, Thomas M.
Issue Date
2011-05-25T14:40:31Z
Director of Research (if dissertation) or Advisor (if thesis)
Choquette, Kent D.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
vertical-cavity surface-emitting laser (VCSEL)
p-type/intrinsic/n-type (PIN) photodetector
position
velocity
integrated
sensing
Abstract
A position sensing optical microsystem that is low-power, non-contact and long-range was characterized. A vertical-cavity surface-emitting laser monolithically integrated with a photodetector packaged in a low profile assembly was used in conjunction with a metallic optical grating. By observing the modulated reflection of laser light off the grating collected by the detector,
we can determine the speed and/or the relative position of the grating. The capability of the assembly as a sensor was investigated using a motorized
stage and an air gantry motion system. On the air gantry system, the position sensing assembly measured the distance traveled to within 0.875 microns and the velocity to within 3% of the speed measured by conventional means.
With the linear actuator, due to the discrete steps of operation, the measured distance was within 3.5 microns and the velocity to within 60%.
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