Control policies for scheduling of semiconductor manufacturing plants
Lu, Steve Chi-Hung
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Permalink
https://hdl.handle.net/2142/22295
Description
Title
Control policies for scheduling of semiconductor manufacturing plants
Author(s)
Lu, Steve Chi-Hung
Issue Date
1994
Doctoral Committee Chair(s)
Kumar, P.R.
Department of Study
Electrical and Computer Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Engineering, Industrial
Operations Research
Language
eng
Abstract
We study the problem of scheduling large semiconductor manufacturing facilities which can be modeled as re-entrant lines and the stability of such re-entrant lines for several buffer priority and due-date-based policies subject to deterministic bursty arrivals. By stability, we mean that the work-in-process in the system is bounded for all time, or equivalently, the delay of a job flowing through the system is bounded. Not all buffer priority policies are stable, as witnessed by a counterexample which thus instigates the stability study.
We introduce a new class of scheduling policies, called Fluctuation Smoothing (FS), which reduces various fluctuations in the network. We have tested our policies on the research and development (R&D) fabrication line that has been studied by Wein (37). By means of an extended simulation experiment, it is shown that the Fluctuation Smoothing Policy for the Variance of Cycle Time (FSVCT) can reduce, very effectively, the variance of cycle time, while the Fluctuation Smoothing Policy for the Mean Cycle Time (FSMCT) reduces the mean cycle time. For example, under the recommended Workload Regulation Release policy, our policy achieves a reduction of 22.4% in the mean queueing time, and a reduction of 52.0% in the standard deviation of cycle time, over that for the baseline FIFO policy. Statistical tests corroborate our conclusions.
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