Characterization of a molded plastic array of ten microplasma jet devices
Ma, Jeffrey H.
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https://hdl.handle.net/2142/18544
Description
Title
Characterization of a molded plastic array of ten microplasma jet devices
Author(s)
Ma, Jeffrey H.
Issue Date
2011-01-21T22:45:22Z
Director of Research (if dissertation) or Advisor (if thesis)
Eden, James G.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
microplasma jet
flexible
transparent
array
He microplasma
Abstract
Novel microplasma jet devices can be fabricated in plastic substrates using inexpensive tools and materials. A simple molding process used for creating microplasma channels has been developed at the Laboratory for Optical Physics and Engineering. These devices have provided the opportunity to investigate characteristics and potential applications of arrays of microplasma jets. In this thesis, the basic plasma physics in addition to the necessary fabrication and experimental techniques are discussed. Finally, the operating characteristics of a particular type of microplasma jet array are discussed. The results presented have opened the door to realizing large arrays of low-temperature plasma expansions.
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