Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride
Howe, Brandon M.
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https://hdl.handle.net/2142/18339
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Title Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride Author(s) Howe, Brandon M. Issue Date 2011-01-14T22:46:47Z Director of Research (if dissertation) or Advisor (if thesis) Petrov, Ivan G. Doctoral Committee Chair(s) Greene, Joseph E. Committee Member(s) Petrov, Ivan G. Rockett, Angus A. Zuo, Jian-Min Department of Study Materials Science & Engineerng Discipline Materials Science & Engr Degree Granting Institution University of Illinois at Urbana-Champaign Degree Name Ph.D. Degree Level Dissertation Keyword(s) hafnium aluminum nitride (HfAlN) hard coatings thin films sputtering nanostructure Graduation Semester 2010-12 Permalink http://hdl.handle.net/2142/18339 Copyright and License Information Copyright 2010 Brandon Marcus Howe
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Graduate Theses and Dissertations at Illinois
