Material characterization and process development for indium-arsenide / indium-gallium-antimonide channel, high electron mobility transistors for low power, high speed applications

Bambery, Rohan

Permalink

https://hdl.handle.net/2142/18297 Copy

Description

Title

Material characterization and process development for indium-arsenide / indium-gallium-antimonide channel, high electron mobility transistors for low power, high speed applications

Author(s)

Bambery, Rohan

Issue Date

2011-01-14T22:45:18Z

Director of Research (if dissertation) or Advisor (if thesis)

Feng, Milton

Department of Study

Electrical & Computer Eng

Discipline

Electrical & Computer Engr

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• High Electron Mobility Transistor (HEMT)
• Aluminium Antimonide (AlSb)
• Indium Arsenide (InAs)

Abstract

Efforts to push the performance of transistors for millimeter-wave and microwave applications have borne fruit through device size scaling and the use of novel material systems. III-V semiconductors and their alloys hold a distinct advantage over silicon because they have much higher electron mobility which is a prerequisite for high frequency operation. InGaAs/InP pseudomorphic heterojunction bipolar transistors (HBTs) have demonstrated fT of 765 GHz at room temperature and InP based high electron mobility transistors (HEMTs) have demonstrated fMax of 1.2 THz. The 6.1 A lattice family of InAs, GaSb, AlSb covers a wide variety of band gaps and is an attractive future material system for high speed device development. Extremely high electron mobilities ~ 30,000 cm^2 V^-1s^-1 have been achieved in modulation doped InAs-AlSb structures. The work described in this thesis involves material characterization and process development for HEMT fabrication on this material system.

Graduation Semester

2010-12

Permalink

http://hdl.handle.net/2142/18297

Copyright and License Information

Copyright 2010 Rohan K. Bambery

Owning Collections