Flexible and transparent microcavity plasma devices: fabricated by polymer-based replica molding technique
Lee, Sung Kun
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https://hdl.handle.net/2142/16152
Description
Title
Flexible and transparent microcavity plasma devices: fabricated by polymer-based replica molding technique
Author(s)
Lee, Sung Kun
Issue Date
2010-05-19T18:39:08Z
Director of Research (if dissertation) or Advisor (if thesis)
Eden, James G.
Department of Study
Materials Science & Engineerng
Discipline
Materials Science & Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Flexible
Transparent
Microplasma
Plasma
Plastic
Polyethylene terephthalate (PET)
display
medical
replica molding
RGB color model
Ultraviolet light
Abstract
The fabrication of flexible and transparent microplasma devices using plastic substrate has explored new avenues in plasma science and technology. A polymer-based replica molding process enables inexpensive and accurate production of microcavities of the devices. Best known as the sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation, microplasma devices fabricated by replica molding techniques also show potential applications as transparent and flexible displays, a radiation source for medical phototherapy, and photonic circuit light sources. In this thesis, the basic physics of plasma discharges is discussed and the performance
and fabrication of microplasma devices by a replica molding process is presented in detail.
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