Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments
Kim, Taek-Lim
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https://hdl.handle.net/2142/15971
Description
Title
Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments
Author(s)
Kim, Taek-Lim
Issue Date
2010-05-18T18:53:01Z
Director of Research (if dissertation) or Advisor (if thesis)
Eden, James G.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Microplasma
Silicon microplasma device
microlaser
microjet
Abstract
Novel microcavity and microchannel plasma devices in Si have provided new and efficient sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation. The realization of this new platform for devices is implemented through VLSI and MEMS fabrication techniques. In this thesis, the basic physics of plasma discharges is presented, and the performance of Si microplasma devices with inverted pyramidal cavity and V-grooved channel configurations is described in some detail.
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