Carbon nanotube strain sensors with wide dynamic range fabricated on flexible substrates by novel processing techniques
Jin, Hyunjong
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https://hdl.handle.net/2142/14722
Description
Title
Carbon nanotube strain sensors with wide dynamic range fabricated on flexible substrates by novel processing techniques
Author(s)
Jin, Hyunjong
Issue Date
2010-01-06T16:41:54Z
Director of Research (if dissertation) or Advisor (if thesis)
Jain, Kanti
Doctoral Committee Chair(s)
Jain, Kanti
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Carbon Nanotube (CNT)
Strain sensor
Structural Health Monitoring (SHM)
Excimer Laser
Photoablation
Abstract
Carbon nanotube (CNT) strain sensors on flexible polyimide substrates with novel fabrication techniques have been fabricated. Excimer laser photoablation was used for simultaneous patterning of the CNT layer and the polyimide substrate. A transferring technique utilizing sacrificial etching was used for clear material transfer. Clear patterns free of CNT-polymer composites were made and were successfully transferred to a flexible substrate. The resulting device has a gauge factor of 60, which is comparable to the 50~150 value for silicon strain sensors. The device exhibits a dynamic range of up to 1.5% strain, far superior to the 0.03% of silicon.
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