University of Illinois Urbana-Champaign

Thermomechanical sensitivity of microcantilever in the mid-infrared spectral region

Kwon, Beomjin

Content Files
2_Kwon_Beomjin.pdf

Permalink

https://hdl.handle.net/2142/14659

Description

Title
Thermomechanical sensitivity of microcantilever in the mid-infrared spectral region
Author(s)
Kwon, Beomjin
Issue Date
2010-01-06T16:20:42Z
Director of Research (if dissertation) or Advisor (if thesis)
King, William P.
Doctoral Committee Chair(s)
King, William P.
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Date of Ingest
2010-01-06T16:20:42Z
Keyword(s)
  • Bimaterial
  • Microcantilevers
  • infrared
  • thermomechanical
  • photothermal
  • FT-IR microscopy
  • monochromator
  • modeling
Abstract
This paper reports the thermomechanical sensitivity of bimaterial cantilevers over a mid-infrared (IR) spectral range (5-10 µm) that is critical both for chemical analysis via vibrational spectroscopy and for direct thermal detection in the 300-700 K range. Mechanical bending sensitivity and noise were measured and modeled for six commercially available microcantilevers, which consist of either an aluminum film on a silicon cantilever or a gold film on a silicon nitride cantilever. The spectral sensitivity of each cantilever was determined by recording cantilever deflection when illuminated with IR light from a monochromator. Rigorous modeling and systematic characterization of the optical system allowed for a quantitative estimate of IR energy incident upon the cantilever. Separately, spectral absorptance of the cantilever was measured using Fourier transform infrared (FT-IR) microscopy, which was compared with analytical models of radiation onto the cantilever and heat flow within the cantilever. The predictions of microcantilever thermomechanical bending sensitivity and noise agree well with measurements, resulting in a ranking of these cantilevers for their potential use in IR measurements.
Graduation Semester
2009-12
Permalink
http://hdl.handle.net/2142/14659
Copyright and License Information
Copyright 2009 Beomjin Kwon

Owning Collections

Graduate Dissertations and Theses at Illinois PRIMARY
Graduate Theses and Dissertations at Illinois
Dissertations and Theses - Mechanical Science and Engineering