Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers
Corbin, Elise Anne
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https://hdl.handle.net/2142/14618
Description
Title
Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers
Author(s)
Corbin, Elise Anne
Issue Date
2010-01-06T16:19:50Z
Director of Research (if dissertation) or Advisor (if thesis)
King, William P.
Doctoral Committee Chair(s)
King, William P.
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Atomic Force Microscopy (AFM)
cantilever
Heated microcantilevers
Temperature
Sensitivity
Resolution
Raman
Spectroscopy
Abstract
This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research
concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip.
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