Surface Studies for the Perdictive Modelling of Titanium Silicide Chemical Vapor Deposition

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https://hdl.handle.net/2142/121636

Title: Surface Studies for the Perdictive Modelling of Titanium Silicide Chemical Vapor Deposition
Author(s): Southwell, Robert Peter
Issue Date: 1991
Director of Research (if dissertation) or Advisor (if thesis): Seebauer, Edmund G.
Department of Study: Chemical & Biomolecular Engineering
Discipline: Chemical Engineering
Degree Granting Institution: University of Illinois at Urbana-Champaign
Degree Name: M.S. (master's)
Degree Level: Thesis
Keyword(s): Titanium Slicide
Language: eng
Type of Resource: text

Graduate Theses and Dissertations at Illinois