Surface Studies for the Perdictive Modelling of Titanium Silicide Chemical Vapor Deposition

Southwell, Robert Peter

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https://hdl.handle.net/2142/121636 Copy

Description

Title

Surface Studies for the Perdictive Modelling of Titanium Silicide Chemical Vapor Deposition

Author(s)

Southwell, Robert Peter

Issue Date

1991

Director of Research (if dissertation) or Advisor (if thesis)

Seebauer, Edmund G.

Department of Study

Chemical & Biomolecular Engineering

Discipline

Chemical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S. (master's)

Degree Level

Thesis

Keyword(s)

Titanium Slicide

Language

eng

Type of Resource

text

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