Surface Chemistry of Titanium Silicide Thin Film Deposition

Michael Anthony, Mendicino

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https://hdl.handle.net/2142/121635 Copy

Description

Title

Surface Chemistry of Titanium Silicide Thin Film Deposition

Author(s)

Michael Anthony, Mendicino

Issue Date

1991

Director of Research (if dissertation) or Advisor (if thesis)

• Seebauer, Edmund G.
• Schultz, Kurt A.

Department of Study

Chemical & Biomolecular Engineering

Discipline

Chemical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S. (master's)

Degree Level

Thesis

Keyword(s)

Titanium Slicide

Language

eng

Type of Resource

text

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