University of Illinois Urbana-Champaign

Interfacial mechanics of strain engineering in thin film capped two-dimensional materials

Hwang, Kelly

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https://hdl.handle.net/2142/121382

Description

Title
Interfacial mechanics of strain engineering in thin film capped two-dimensional materials
Author(s)
Hwang, Kelly
Issue Date
2023-07-21
Director of Research (if dissertation) or Advisor (if thesis)
  • van der Zande, Arend M
  • Ertekin, Elif
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
  • Strain engineering
  • Two-dimensional materials
  • Heterogeneous integration
  • Finite element modelling
  • CMOS processes
Abstract
Spatially varying strains in thin film capped monolayer MoS2 are observed using Raman spectroscopy. We apply a traction-separation model to define the interfacial mechanics which affect the strain distribution. The model is used in finite element analysis (FEA) to directly reveal interfacial mechanisms of strain transfer between the stressor and the two-dimensional material. The developed finite element model accurately reproduces the strain distribution for various stressor geometries observed in experiments, suggesting opportunities to use the model for design and prediction of strains. We also explore the anisotropy of the strain distribution by examining directional strains.
Graduation Semester
2023-08
Type of Resource
Thesis
Copyright and License Information
Copyright 2023 Kelly Hwang

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