Design and fabrication of grating couplers

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https://hdl.handle.net/2142/113903

Title: Design and fabrication of grating couplers
Author(s): Jha, Prasoon
Issue Date: 2021-12-06
Director of Research (if dissertation) or Advisor (if thesis): Vlasov, Yurii A
Department of Study: Electrical & Computer Eng
Discipline: Electrical & Computer Engr
Degree Granting Institution: University of Illinois at Urbana-Champaign
Degree Name: M.S.
Degree Level: Thesis
Keyword(s): grating
Abstract: A silicon neural probe enables the monitoring of chemical dynamics with high spatial and temporal resolution and good chemical sensitivity and selectivity while causing less tissue damage than conventional micro-dialysis probes. Neural activity can be optically stimulated using optogenetics, which can be enabled using an off-chip light source and an optical grating coupler. In this thesis, we discuss the design and fabrication of waveguides and grating couplers, which can be used as a foundation for light delivery systems for various biological applications. Chapter 2 provides some background knowledge on waveguides and grating couplers, the design of which is described in Chapter 3. Chapter 4 covers the fabrication process, and Chapter 5 contains some concluding remarks and possible next steps.
Graduation Semester: 2021-12
Type of Resource: Thesis
Permalink: http://hdl.handle.net/2142/113903

Graduate Theses and Dissertations at Illinois