University of Illinois Urbana-Champaign

Application of controlled spalling to thin-film lithium niobate transducers

Rich, Dennis

Content Files
ECE499-Fa2018-rich.pdf

Permalink

https://hdl.handle.net/2142/105411

Description

Title
Application of controlled spalling to thin-film lithium niobate transducers
Author(s)
Rich, Dennis
Contributor(s)
Bayram, Can
Issue Date
2018-12
Keyword(s)
  • Controlled spalling
  • Thin film
  • Sensors
Date of Ingest
2019-09-04T20:11:16Z
Abstract
The phenomenon of spalling, the peeling of films from substrates based on stress, is investigated for use in production of thin films. Software is developed to understand this process and develop predictions for controlling it. A specific implementation of the controlled spalling method is developed, using electroplating to deposit a stressed film with tunable properties. An original sample holder is developed for efficient performance of this process, and analysis of deposition through scanning electron microscopy profilometry and Nomarski microscopy is used to make it repeatable. Stresses are measured through optical profilometry and determined to be too low; conclusions are drawn about future steps necessary to reach the stresses needed for controlled spalling. Steps are also taken to measure the fracture toughness of lithium niobite through nanoindentation. This measurement, not yet made in the literature, makes possible the analysis of controlled spalling of lithium niobite for application to thin-film transducers useful to stress sensing and communications in restrictive form-factor settings such as outer space or the human body.
Type of Resource
text
Genre of Resource
Other
Language
en
Permalink
http://hdl.handle.net/2142/105411
Sponsor(s)/Grant Number(s)
Air Force Office of Scientific Research Young Investicator Program, number FA9550-16-1-0224

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