University of Illinois Urbana-Champaign

Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM

Chen, Sihan

Content Files
CHEN-THESIS-2015.pdf

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https://hdl.handle.net/2142/105279

Description

Title
Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM
Author(s)
Chen, Sihan
Issue Date
2015-07-20
Director of Research (if dissertation) or Advisor (if thesis)
King, William P.
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Date of Ingest
2019-08-23T20:48:28Z
Keyword(s)
  • contact stiffness
  • AFM
  • calibration
Abstract
This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.
Graduation Semester
2015-08
Type of Resource
text
Permalink
http://hdl.handle.net/2142/105279
Copyright and License Information
Copyright 2015 by Sihan Chen. All rights reserved.

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