Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM

Chen, Sihan

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https://hdl.handle.net/2142/105279 Copy

Description

Title

Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM

Author(s)

Chen, Sihan

Issue Date

2015-07-20

Director of Research (if dissertation) or Advisor (if thesis)

King, William P.

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• contact stiffness
• AFM
• calibration

Abstract

This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes.

Graduation Semester

2015-08

Type of Resource

text

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http://hdl.handle.net/2142/105279

Copyright and License Information

Copyright 2015 by Sihan Chen. All rights reserved.

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