University of Illinois Urbana-Champaign

Design and process development for the fabrication of GaP, guided mode resonance grading to make a single-layer linear variable filter for use in cheap and portable colorimetric assays

Ganjoo, Maanav

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https://hdl.handle.net/2142/104009

Description

Title
Design and process development for the fabrication of GaP, guided mode resonance grading to make a single-layer linear variable filter for use in cheap and portable colorimetric assays
Author(s)
Ganjoo, Maanav
Contributor(s)
Dallesasse, John
Issue Date
2019-05
Keyword(s)
  • Gallium Phosphide
  • Smart-Cut
  • Anodic Bonding
  • Dry-etch
  • Ion Implantation
Abstract
A single-layer, linear variable filter design employing guided mode resonance (GMR) gratings etched into a thin-film layer of GaP bonded onto a borosilicate substrate is designed and a fabrication process is developed. This offers a cheaper and simpler alternative to multi-layer, distributed Bragg reflector filters. The device is designed to be fitted into a low-cost smartphone-based spectrometric platform that can perform sensitive and reliable assays of antigens that could improve the accessibility of diagnostics for major diseases and water quality in developing areas. In order to fabricate the proposed filter, a helium ion implant profile in GaP is stochastically simulated to determine the projected range. An anodic bonding process is then developed to form a hermetic and “glue-less” seal between the helium-implanted GaP and borosilicate glass. Through a thermal anneal, a thin-layer is exfoliated, stripping it from the bulk substrate and fixing the thin-film onto the borosilicate carrier wafer. After polishing, gratings are lithographically patterned into the thin film via e-beam lithography followed by a plasma etch to define the GMR grating.
Type of Resource
text
Language
en
Permalink
http://hdl.handle.net/2142/104009
Sponsor(s)/Grant Number(s)
support of the National Institute of Health

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