University of Illinois Urbana-Champaign

Thermal Properties of Perforated Self-Rolled Silicon Nitride Membranes

Michaels, Julian A.

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https://hdl.handle.net/2142/99004

Description

Title
Thermal Properties of Perforated Self-Rolled Silicon Nitride Membranes
Author(s)
Michaels, Julian A.
Contributor(s)
Li, Xiuling
Issue Date
2017-12
Keyword(s)
  • Silicon nitride membrane
  • Self-rolled-up
  • Thermal annealing
  • Programmable fuse
Abstract
This thesis explores the thermal effects of perforations on silicon nitride (SiNx) self-rolled-up membranes, which are formed by self-assembly, utilizing compressive and tensile layers of SiNx. Tubular structures, lithographically defined with a variety of hole pattern designs, are exposed to several ranges of temperature using rapid thermal annealing (RTA) and electrical current. The shape deformation as a function of temperature is studied systematically. Using the observed thermal effects, an on-chip programmable fuse is presented as a potential device for power circuits.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/99004

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