University of Illinois Urbana-Champaign

A fuzzy logic control system for a high temperature semiconductor furnace

Buszkiewicz, Jim Raymond

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https://hdl.handle.net/2142/97986

Description

Title
A fuzzy logic control system for a high temperature semiconductor furnace
Author(s)
Buszkiewicz, Jim Raymond
Issue Date
1994
Director of Research (if dissertation) or Advisor (if thesis)
Uribe, Ricardo B.
Department of Study
Electrical & Computer Engineering
Discipline
Electrical & Computer Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Keyword(s)
  • Electrical engineering
  • Contactor control systems
  • Electric furnaces
  • Fuzzy logic
Language
en
Permalink
http://hdl.handle.net/2142/97986
Copyright and License Information
Copyright 1994 held by Jim Raymond Buszkiewicz

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