University of Illinois Urbana-Champaign

Study of Dipolar Polarization in Silicon Nitride Films Using an Adapted Thermally Stimulated Current Technique

Starnes, Robert Michael

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https://hdl.handle.net/2142/75048

Description

Title
Study of Dipolar Polarization in Silicon Nitride Films Using an Adapted Thermally Stimulated Current Technique
Author(s)
Starnes, Robert Michael
Issue Date
1972-04
Keyword(s)
  • Films
  • Polarization
  • Thermally-stimulated current
  • Thermally stimulated current
  • Silicon nitride
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 72-2215, R-554
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75048
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program / DAAB-07-67-C-0199

Owning Collections

Report - Coordinated Science Laboratory PRIMARY