University of Illinois Urbana-Champaign

Crystal Growth and Electrical Properties of Sputtered Indium Gallium Antimonide Thin Films

Eltoukhy, Atef Helmy

This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.

Permalink

https://hdl.handle.net/2142/75636

Description

Title
Crystal Growth and Electrical Properties of Sputtered Indium Gallium Antimonide Thin Films
Author(s)
Eltoukhy, Atef Helmy
Issue Date
1978-09
Keyword(s)
  • Thin films
  • Sputtering
  • Electrical properties
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 78-2221, R-828
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75636
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program / DAAB-07-72-C-0259

Owning Collections

Report - Coordinated Science Laboratory PRIMARY