University of Illinois Urbana-Champaign

Analysis of Electron Traps in Silicon and Gallium Arsenide by Deep-Level Transient Spectroscopy

DeJule, Ruthanna Yusa

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https://hdl.handle.net/2142/75211

Description

Title
Analysis of Electron Traps in Silicon and Gallium Arsenide by Deep-Level Transient Spectroscopy
Author(s)
DeJule, Ruthanna Yusa
Issue Date
1982-08
Keyword(s)
  • Deep-level transient spectroscopy (DLTS)
  • Swept-line electron beam annealing (SLEB)
  • Silicon and gallium arsenide
  • Defects
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 82-2223, R-957
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75211
Sponsor(s)/Grant Number(s)
  • Joint Services Electronics Program / N00014-79-C-0424
  • Office of Army Research / DAAG29-80-C-0011

Owning Collections

Report - Coordinated Science Laboratory PRIMARY