University of Illinois Urbana-Champaign

Encapsulation and Implantation Studies of Indium Phosphide

Oberstar, John David

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https://hdl.handle.net/2142/75666

Description

Title
Encapsulation and Implantation Studies of Indium Phosphide
Author(s)
Oberstar, John David
Issue Date
1982-07
Keyword(s)
  • Semiconductors
  • Ion implantation
  • Indium phosphide
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 82-2224, R-958
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75666
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program

Owning Collections

Report - Coordinated Science Laboratory PRIMARY