Encapsulation Studies and Planar Device Fabrication in Gallium Arsenide

Helix, Max John

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https://hdl.handle.net/2142/75649 Copy

Description

Title

Encapsulation Studies and Planar Device Fabrication in Gallium Arsenide

Author(s)

Helix, Max John

Issue Date

1979-09

Keyword(s)

• Ion implantation
• GaAs
• Silicon nitride

Publisher

Coordinated Science Laboratory, University of Illinois at Urbana-Champaign

Series/Report Name or Number

Coordinated Science Laboratory Report no. UILU-ENG 78-2251, R-858

Type of Resource

text

Language

English

Permalink

http://hdl.handle.net/2142/75649

Sponsor(s)/Grant Number(s)

• Joint Services Electronics Program / N00014-79-C-0424
• Office of Naval Research / ONR N00014-76-C-0806

Owning Collections