University of Illinois Urbana-Champaign

Glow Discharge Optical Spectroscopy for Measurement of Boron Implanted Distributions in Silicon

Marcyk, Gerald Twiggs

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https://hdl.handle.net/2142/75117

Description

Title
Glow Discharge Optical Spectroscopy for Measurement of Boron Implanted Distributions in Silicon
Author(s)
Marcyk, Gerald Twiggs
Issue Date
1976-03
Keyword(s)
  • Ion implantation
  • Boron impurity
  • Glow discharge optical spectroscopy
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 76-2208, R-720
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75117
Sponsor(s)/Grant Number(s)
  • Joint Services Electronics Program / DAAB-07-72-C-0259
  • National Science Foundation / NSF DMR-73-02359

Owning Collections

Report - Coordinated Science Laboratory PRIMARY