University of Illinois Urbana-Champaign

Annealing Related Defects in Gallium Arsenide

Durschlag, Mark Stuart

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https://hdl.handle.net/2142/75120

Description

Title
Annealing Related Defects in Gallium Arsenide
Author(s)
Durschlag, Mark Stuart
Issue Date
1976-07
Keyword(s)
  • Defects in gallium arsenide
  • Plasma deposition of silicon nitride
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 76-2220, R-732
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75120
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program / DAAB-07-72-C-0259

Owning Collections

Report - Coordinated Science Laboratory PRIMARY