University of Illinois Urbana-Champaign Academic Units Grainger College of Engineering Coordinated Science Laboratory Report - Coordinated Science Laboratory Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide
Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide
Banerjee, Sanjay Kumar
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Title Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide Author(s) Banerjee, Sanjay Kumar Issue Date 1983-07 Keyword(s) Semiconductors Silicon-on-insulator Ion implantation Date of Ingest 2015-04-22T16:10:09Z 2017-07-14T23:59:53Z Publisher Coordinated Science Laboratory, University of Illinois at Urbana-Champaign Series/Report Name or Number Coordinated Science Laboratory Report no. UILU-ENG 83-2212, R-991 Type of Resource text Language English Permalink http://hdl.handle.net/2142/75673 Sponsor(s)/Grant Number(s) Joint Services Electronics Program and Office of Naval Research / N00014-79-C-0424 and N00014-81-K-0431
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