Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide

Banerjee, Sanjay Kumar

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https://hdl.handle.net/2142/75673 Copy

Description

Title

Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide

Author(s)

Banerjee, Sanjay Kumar

Issue Date

1983-07

Keyword(s)

• Semiconductors
• Silicon-on-insulator
• Ion implantation

Publisher

Coordinated Science Laboratory, University of Illinois at Urbana-Champaign

Series/Report Name or Number

Coordinated Science Laboratory Report no. UILU-ENG 83-2212, R-991

Type of Resource

text

Language

English

Permalink

http://hdl.handle.net/2142/75673

Sponsor(s)/Grant Number(s)

Joint Services Electronics Program and Office of Naval Research / N00014-79-C-0424 and N00014-81-K-0431

Owning Collections