Formation of Silicon Nitride Structures by Direct Electron-Beam Writing

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https://hdl.handle.net/2142/75662

Title: Formation of Silicon Nitride Structures by Direct Electron-Beam Writing
Author(s): Chin, Brymer Han-Yu
Issue Date: 1982-02
Publisher: Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number: Coordinated Science Laboratory Report no. UILU-ENG 82-2206, R-940
Type of Resource: text
Language: English
Permalink: http://hdl.handle.net/2142/75662
Sponsor(s)/Grant Number(s): Joint Services Electronics Program / N00014-79-C-0424