University of Illinois Urbana-Champaign

Swept Line Electron Beam Annealing of Ion-Implanted Semiconductors

Soda, Kenneth James

This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.

Permalink

https://hdl.handle.net/2142/75663

Description

Title
Swept Line Electron Beam Annealing of Ion-Implanted Semiconductors
Author(s)
Soda, Kenneth James
Issue Date
1982-07
Keyword(s)
  • Electron beam annealing
  • Ion-implantation
  • Ion implantation
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 82-2216, R-950
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75663
Sponsor(s)/Grant Number(s)
  • Joint Services Electronics Program / N00014-79-C-0424
  • Army Research Office / DAAG-29-80-C-0011

Owning Collections

Report - Coordinated Science Laboratory PRIMARY