University of Illinois Urbana-Champaign

Studies of High-Dose Ion Implantation in Silicon

Tsai, Mon Yen

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https://hdl.handle.net/2142/75634

Description

Title
Studies of High-Dose Ion Implantation in Silicon
Author(s)
Tsai, Mon Yen
Issue Date
1978-09
Keyword(s)
  • High-dose ion implantation in silicon
  • Recrystallization of implanted amorphous silicon
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 78-2217, R-824
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75634
Sponsor(s)/Grant Number(s)
  • Joint Services Electronics Program / DAAB-07-72-C-0259
  • National Science Foundation / NSF DMR 77-22228

Owning Collections

Report - Coordinated Science Laboratory PRIMARY