Electrical Properties of Some Vacuum Deposited Insulating Films

Reilly, Owen

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https://hdl.handle.net/2142/74671 Copy

Description

Title

Electrical Properties of Some Vacuum Deposited Insulating Films

Author(s)

Reilly, Owen

Issue Date

1969-01

Keyword(s)

• Thin film
• Insulators
• Vacuum deposition
• Resistivities

Publisher

Coordinated Science Laboratory, University of Illinois at Urbana-Champaign

Series/Report Name or Number

Coordinated Science Laboratory Report no. R-403

Type of Resource

text

Language

English

Permalink

http://hdl.handle.net/2142/74671

Sponsor(s)/Grant Number(s)

• Joint Services Electronics Program / DAAB 07-67-C-0199
• Army DAAK-02-67-C-0546

Owning Collections